Introduction to Semico nductor Manufacturing and FA Process
Back End(BE) Process Wafer Back Grinding • The typical wafer supplied from 'wafer fab' is 600 to 750μm thick. • Wafer thinned down to the required thickness, 50um to 75um, by abrasive grinding wheel. › 1st step : Use a large grit to coarsely grind the wafer and remove the bulk of the excess wafer thickness.
